Sputtering coating line (Magnetron sputtering coating system)
Application: Magnetron sputtering coating technology can be widely applicable in optical, electric, mechanism, decoration, transportation,aviation.ect.
7）inline sputtering
Applications:
Use to coat single-layer film, alloy film, metal compound film on pre-treat glass or other materials to have the functions of shading, heat insulation, energy saving and decorative effect.
1. Characteristics:
1. Using planar and cylindrical magnetron sputtering target shooting technology to improve effectiveness and efficiency of coating.
2. Equipped with high-precise magnetic power supply, MFC and speed control with high degree of automation, easy operation and stable performance.
3. Good coating evenness, strong adhesion, high hardness, good anti-corrosion, and a variety of colors can be coated.
4. Traditional vertical design or efficient horizontal designs as per customers’ request
2. Product structure:
1. Loading station
Supply manual drum-type or automatic loading system.
2. Glass pre-cleaning machine
In order to obtain a good adhesion, less pinhole, brightly-colored ,even high-quality film, this cleaning machine equipped with two sets of vertical brush cleaning , three sets of Rolling Brush cleaning, two sets of tap water rinse, two sets of de-ionized water rinse, and four wind drying fans, so that the glass can good pretreatment.
3. Pre-pumping chamber
Pretreated glass was kept in pre-pumping for waiting the signal from pre-locked chamber to move into the pumping chamber. There is some positive pressure to prevent dust from air.
4. Pre-locked chamber
Glass move quickly into pre-locked chamber from pre-pumping chamber. The vacuum level can reach 1 Pa.
5. Pre-transition
Pre-transition room is the transition between Pre-locked room and sputtering room. The vacuum level of this room is from 1Pa to 10-1 pa.
6. Sputtering chamber
Sputtering chamber can be separated into several same structure chambers; the gas between different chambers can be well separated. According to different requested, target and gas can be changed arbitrarily. When glass pass the target, there can single or multilayer coated on the class.
7. Post transition room
Coates glass move to post locked chamber from this room.
8. Post locked chamber
When vacuum level in this chamber reaches 1 pa, valve between post transition room and post locked room open, when the valve automatically locked again , then gas quickly deflated .When vacuum level of this room become 105Pa., the valve between locked room and unloading room open, the glass quickly sent to unloading chamber.
1. post transition chamber
Glass was kept in this room before sent to washing machine.
10. On-line checking room
Measurement the transmission and reflectivity of coated glass by one optical measurement system and one light source system.
11. Unloading station
Unloading station can be equipped with auto unloading structure, so it become automatic unloading device.
12. Magnetron sputtering power supply
Using advanced power technology, the sputtering process is very stable, with automatic protection and automatic reset function.
13. Electric control system
Using two upper computer and PLC systems to the important process parameters of the system for dynamic control and display, alarm and report printing. Production line of multi-channel optical monitoring devices are related to computer networking, automated color measurement, the measured thickness
Using two upper computer and PLC systems to dynamic and display alarm and print the important process parameters. Several optical inspected systems are connected to the computer, so the color and thickness of the film can be automatically controlled.
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